激光共聚焦显微镜在磨损表面粗糙度表征中的应用  

Application of Laser Scanning Confocal Microscopy in Roughness Characterization of Worn Surface

作　　者：孙大乐[1] 吴琼[1] 刘常升[1] 张恒[2] 姚利松[2] 

机构地区：[1]东北大学材料与冶金学院,辽宁沈阳110004 [2]宝山钢铁有限公司研究院,上海201900

出　　处：《中国激光》2008年第9期1409-1414,共6页Chinese Journal of Lasers

基　　金：宝钢集团重大科研项目(R05DSES220)资助课题

摘　　要：磨损是材料常见的表面失效现象，粗糙度是数字化描述材料磨损表面形貌特征的最常用参数。采用激光共聚焦显微镜（LSCM），通过调节物镜倍率、测量视场和过滤参数等，能够得到材料磨损表面的真实形貌，同时能够对磨损表面三维（3D）形貌特征进行精确数字化描述。对常见的粗糙度值0.5～2.0μm磨损表面采用20×物镜扫描测最比较合适；粗糙度小于0.5μm的磨损表面宜采用50×物镜；粗糙度大于2.5μm宜采用10×物镜。对比较规则的磨损表面。采用1～3个物镜视场叠加扫描即可得到比较精确的粗糙度值；对于不太规则的磨损表面，则需要3～5个物镜视场叠加扫描。借助这一手段，采用上述优化参数对Cr5冷轧辊材料磨损各阶段试样表面形貌及粗糙度轮廓曲线进行表征、分析，效果较好。Wear is the most frequently surface failure of the materials, and roughness is the most commonly used parameter to describe the characteristics of the worn surface numerically. Laser scanning confocal microscopy （LSCM） was used to get the image of wron surface topography by adjusting the objective lens and measuring field of view and filter parameters, the accurate numerical description of the three dimensional （3D） worn surface was obtained at the same time. For commonly roughness value between 0.5 and 2.0 μm, the 20 × lens is the best choice, while for the larger or smaller roughness value, 10 × and 50 × lens should be used, respectively. For regular worn surface, the accurate roughness value can be obtained within 1 to 3 combined optical field, while for the irregular one, the combined number of optical field should be 3 to 5 or more. Based on this method, the worn surface topography of a Cr5 cold roll was well analyzed in different wear patterns.

关 键 词：光学设计与制造 磨损 粗糙度 激光共聚焦显微镜 表面形貌 数字化描述 

分 类 号：TH117.1[机械工程—机械设计及理论]