一种新型微纳无线湿度传感器的研制  

The design and study of a novel micro-nano wireless humidity sensor

作　　者：蒋珂玮[1] 张健[1] 刘伟景[1] 万丽娟[1] 陶佰睿[1] 

机构地区：[1]华东师范大学电子系,上海200062

出　　处：《齐齐哈尔大学学报（自然科学版）》2008年第4期21-23,共3页Journal of Qiqihar University(Natural Science Edition)

摘　　要：研究了一种新型微纳无线湿度传感器的研制方法,该传感器是通过介电泳技术把ZnO纳米棒定位在自行设计的微电极中间。ZnO纳米材料具有巨大的比表面积和界面,利用ZnO纳米结构对湿度具有很好的吸附和解吸附性能可以制作一种湿度传感器。通过基本传感特性的测试,证实了该传感器具有良好的重复特性和较高的灵敏度。另外,通过GSM Modem,将该传感器与温度传感器相结合,制成一种家用无线温湿探测系统,能使用户很方便地了解室内的温湿信息。In this paper a new micro-/nano-wireless humidity sensor has been discussed. This sensor was made through dielectrophoresis by dropping ZnO sample droplet on the electrode pairs by micro-dropper used in the system. ZnO is a good semiconductor material with distinctive optical, electronic and chemical properties due to its high surface-to-volume ratio. By making use of these properties, a humidity sensor can be fabricated. After tested several properties, the high sensitivity and well repeatability of the sensor have been proved. Through the combination of this sensor, temperature sensor and GSM Modem, this sensor system will be more multi-functional to the customer to know the situation in the house.

关 键 词：GSM ZNO 介电泳 湿度传感器 

分 类 号：TP212.11[自动化与计算机技术—检测技术与自动化装置]