基于引擎机制的PECVD工作过程的虚拟仿真  

The Virtual Simulation of PECVD Process Based on the Engine Mechanism

作　　者：王栋[1] 马小峰[1] 李大磊[1] 胡书杰[1] 

机构地区：[1]郑州大学机械工程学院,河南郑州450001

出　　处：《郑州大学学报（工学版）》2008年第3期54-58,共5页Journal of Zhengzhou University（Engineering Science）

基　　金：上海市重大科技攻关项目(05DZ11001)

摘　　要：讨论了卧式PECVD的工作原理,对虚拟加工过程中仿真实现的关键技术进行了研究.基于Open Inventor开发平台强大的引擎机制,用程序实现了连续式等离子体增强化学汽相沉积(PECVD)系统(In-line PECVD System)的虚拟加工工作过程的仿真,从而保证物理样机的设计成功率、减少物理样机的设计与试制时间.Firstly, the working principle of PECVD is introduced. This paper studies the key technologies to implement the motion simulation of virtual process through using the engine mechanism which is well encapsulated in Open Inventor development platform. Finally , the implementation of In-line PECVD System （IL- PECVDS10-1） verifies that the engine mechanism is feasible and efficient. Compared to the previous methods, the method in this paper provides an effective approach for the motion simulation, which can decrease the time on designing and manufacturing and can increase the success ratio for physical model.

关 键 词：虚拟现实 等离子体增强化学汽相沉积 过程仿真 引擎机制 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]