X射线光电子能谱仪样品前处理装置的设计及应用  

Design of a sample pretreatment device for X-ray photoelectron spectrometer

作　　者：伊晓东[1] 郭建平[1] 孙海珍[1] 时海燕[1] 王水菊[1] 万惠霖[1] 

机构地区：[1]厦门大学化学化工学院化学系固体表面物理化学国家重点实验室,厦门361005

出　　处：《分析仪器》2008年第5期8-11,共4页Analytical Instrumentation

基　　金：国家重点基础研究发展规划项目(2004CB217805);福建省自然科学基金(U0750016)资助项目

摘　　要：针对商品X射线光电子能谱仪(XPS)不能在通常的化学反应条件下进行原位分析的缺点,设计了与能谱仪配套连接的样品前处理装置。该装置可以将经预处理(如高温氧化、还原和预吸附等)或反应后的样品厌氧转入能谱仪,使X射线光电子能谱仪对表面的探测结果能真实地代表样品在反应或预处理后的组成与结构特征。对还原态NiO的XPS表征结果表明,采用样品前处理装置进行处理后,还原态NiO从反应器转至能谱仪过程中没有发生再氧化现象。The commercial photoelectron spectrometer can not be used for in situ analysis under conditions of conventional chemical reaction. In order to solve this problem, a sample pretreament device was designed to match with X-ray photoelectron spectrometer （XPS）. The device transfers samples after pretreatment （high-temperature oxidation, reduction or pre-absorption） or after reaction into the spectrometer under the protection of nitrogen （without exposure to air）, so that the surface detection results represent the real composition and structure characteristics of the pretreated or reacted samples. The experinental results of a reduced NiO sample showed that no re-oxidation occured during the transfer process in the sample pretreatment device.

关 键 词：X射线光电子能谱仪 样品前处理装置 准原位XPS方法 NIO 

分 类 号：TH842[机械工程—仪器科学与技术]