金属有机化合物化学气相淀积含钛硬质涂层的性能研究  

Characteristic Study of Hard Coatings Containing Titanium Prepared by Metallo-Organic Chemical Vapour Deposition

作　　者：周定为 韩杰[1] 袁渭康[1] 

机构地区：[1]华东化工学院联合反应工程研究所技术化学物理研究室

出　　处：《华东化工学院学报》1990年第4期370-375,共6页

摘　　要：在用文题淀积方法制备出氮化钛、碳氮化钛和碳氮氧化钛硬质涂层的基础上,用表面分析手段分别进行了成分、结构分析、形貌观察和硬度测定。结果表明:以二乙胺基钛为原料可分别在773K和973K淀积氮化钛和碳氮化钛涂层;用钛酸异丙酯和钛酸丁酯可分别在973K和1073K获得碳氮氧化钛涂层。所得的涂层表面光洁度高、与基体附着性好、硬度满足实用要求。相比于普通化学气相淀积方法,本法在制备硬质涂层上有两大优点:(1)淀积温度降低,扩大了基体的选用范围;(2)固溶体涂层的获得扩大了涂层的适用范围。By using auger electron spectroscopy (AES) to determine surface composition, X-ray diffraction (XRD) to determine crystal structure, scanning electron microscope (SEM) to observe surface morphology and microhardness instrument to determine surface microhardness, hard coatings (TIN, Ti(C,N) & Ti(C, N, O)) prepared by metallo-organic chemical vapour deposition (MOCVD) are verified to have smooth surface good adherence to substrate and high hardness. Contrast to typical CVD method. MOCVD has two advantages that deposition temper-ature has been lowered so as to enlarge the range of substrate selection and solid-solution coat-ings. with wide application are obtained.

关 键 词：氮化钛 化学气相淀积 硬质涂层 

分 类 号：O614.411[理学—无机化学]