逐步升压法制备大面积小孔径阳极氧化铝模板  

Anodic Aluminum Oxide Template with Large Area and Small Holes Prepared by Gradual Voltage-Rising Method

作　　者：尚杰[1] 刘丽来[1] 杨瑞明[2] 张鹏翔[1] 

机构地区：[1]昆明理工大学光电子新材料研究所,昆明650051 [2]曲靖师范学院物理系,曲靖655000

出　　处：《纳米技术与精密工程》2008年第5期322-326,共5页Nanotechnology and Precision Engineering

基　　金：云南省科技厅应用基础研究计划资助项目(2006A0082M)

摘　　要：在酸性电解液中,采用逐步升压法制备了高度有序的大面积阳极氧化铝(anodic aluminum oxide,AAO)模板.与传统方法制得的AAO模板相比,其有效氧化面积提高了20多倍.扫描电子显微镜(scanning electron micro-scope,SEM)对模板微观结构的表征结果表明,二者几乎具有相同的有序度和孔密度,且孔洞分布均匀.但相比之下,采用逐步升压法制备的模板孔径要小得多,电压为42V时制得的模板的平均孔径(32.4nm)约为传统方法制得的模板平均孔径(63.2nm)的1/2.In acidulous electrolyte, the highly ordered anodic aluminum oxide （ AAO ） template with large area and small holes was prepared by gradual voltage-rising method. Compared with the traditional AAO template, its effective oxidized area was enhanced by more than 20 times. Scanning electron microscopy （ SEM ） was used to observe the microstructure of template. The results indicate that the AAO template with large area and the traditional one almost have the same degree of order and the same hole density. And the holes are evenly distributed. Compared with the average aperture size of the template （63.2 nm） prepared by traditional method, the average aperture size of the template （32.4 nm） prepared by gradual voltage-rising method is much smaller when the voltage is 42 V.

关 键 词：逐步升压法 大面积 小孔径 氧化铝模板 

分 类 号：O484.1[理学—固体物理]