高性能高温超导红外探测器  

Fabrication of High T c Superconducting Infrared Detectors with High Performance

作　　者：刘心田[1] 陆惠秀[1] 刘兴海[1] 陈启斌 汤定元[1] 

机构地区：[1]中国科学院上海技术物理研究所

出　　处：《红外技术》1997年第6期5-7,共3页Infrared Technology

摘　　要：选用高温超导体ＹＢＣＯ薄膜，利用集成微加工工艺，制成高温超导红外探测器。测得器件的等效噪声功率ＮＥＰ达到１０－１２Ｗ／Ｈｚ１／２，探测率Ｄ为１０９ｃｍＨｚ１／２／Ｗ，其中最好的器件性能为Ｄ＝１．８×１０１０ｃｍＨｚ１／２／Ｗ，表明这类探测器已进入实用阶段，成为红外探测技术发展的新方向之一。The high T c superconducting infrared detectors were fabricated by using thin film of integration technology.It was shown that the performance of the detectors were goods,NEP was 10 -12 W/Hz 1/2 and D * 10 9 cmHz 1/2 /W.In the future,high T c superconduct inginfrared detectors may offer practical applications.It is one of the developing trend of IR detection technology.

关 键 词：红外探测器 高温超导体 超导材料 

分 类 号：TN215[电子电信—物理电子学] TM26[一般工业技术—材料科学与工程]