电磁六极透镜的磁场分布  

The Magnetic Field Distribution of an Electeomagnetic Sextupole

作　　者：木崇俊[1] 窦菊英[1] 陈尔纲[1] 

机构地区：[1]云南大学物理系

出　　处：《电子学报》1997年第12期112-115,共4页Acta Electronica Sinica

摘　　要：本文叙述一种可用于电子显微镜球差矫Ｅ系统的电磁六极透镜的磁场分布研究结果．研究工作系用实验测定磁场分布和理论分析相结合的方法，给出六极透镜磁感应强度各分量的数值和近似公式，特别着重分析了六极边缘区域的磁场分布情况．In this paper some studying results of the magnetic field distribution of an electromagneticalsextupole applying to a system for correction of spherical aberration in round electron lens are described. Measurement data of the magnetic induction in every coordinates in the sextupole and thier approximate formulas forideal and practical sextupole are given by combining experimental measurements and theoretical analyses. Themagnetic field distribution at the edge of the sextupole is discussed in more detail.

关 键 词：电磁六极透镜 磁感应强度 边缘效应 电子显微镜 

分 类 号：TN16[电子电信—物理电子学]