聚合物木堆微结构制备的研究  

Fabrication of Polymer Woodpile Microstructure

作　　者：李运鹏[1] 许静[1] 李宇杰[1] 韩喻[1] 胡宗倩[1] 谢凯[1] 

机构地区：[1]国防科学技术大学材料工程与应用化学系,长沙410073

出　　处：《微纳电子技术》2008年第9期516-520,共5页Micronanoelectronic Technology

基　　金：国家部委基金资助项目

摘　　要：提出一种新的、成本低廉的方法制备大面积聚合物两层木堆结构。首先分别对刻槽硅片模板进行亲水和疏水表面处理,以形成表面自由能不同的表面。将两块表面能不同的模板微条纹垂直对齐后紧压形成微通道三维网状结构,再利用毛细管作用力分别将甲基丙烯酸甲酯、聚二甲基硅氧烷(PDMS)、苯乙烯等三种聚合物的预聚体渗透到微通道内,固化成型后冷却脱模,得到两层木堆结构。该聚合物木堆结构从低表面能模板脱离,附着于高表面能模板上。扫描电镜结果分析表明:用苯乙烯预聚体可以得到结构完整、不变形卷曲的两层木堆微结构,且层间无多余粘连层。A novel and cheap method for fabrication of a large area two-layer polymer woodpile structure was proposed. At the beginning of the process, the surface treatment of two silicon molds with horizontal and vertical trenches was made to be hydrophobic and hydrophilic separately in order to obtain the different interfacial free energy. Next, the molds with different interfacial free energy were pressed tightly after micro slots snapped vertically to form the three-dimensional network. The prepolymers of methyl methacrylate, poly dimethysiloxane and styrene were infiltrated into the microchannels of the network with capillarity. Finally, the molds were cooled after polymerization, and then the two-layer woodpile structure was obtained. Scanning electron microscope （SEM） was used to analyze the structure of the two-layer woodpile. The results show that the two-layer woodpile made of styrene prepolymers has not anamorphic and frizzy structure without redundant polymer between the two layers.

关 键 词：木堆结构 毛细管力 表面处理 预聚体 光子晶体 

分 类 号：TM285[一般工业技术—材料科学与工程] TH703[电气工程—电工理论与新技术]