超磁致伸缩薄膜特性及其在气体检测中的应用  

The Property of Giant Magnetostrictive Thin Film and Its Application in Gas Detection

作　　者：赵建国[1] 包岩峰[2] 王福吉[1] 刘巍[1] 陈怒潭[1] 刘冬[1] 

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024 [2]辽宁省机械研究院有限公司,辽宁沈阳110001

出　　处：《装备制造技术》2008年第9期44-46,共3页Equipment Manufacturing Technology

基　　金：国家自然科学基金资助项目(50605005)

摘　　要：通过分析薄膜共振频率的影响因素,将一种具有正负磁致伸缩性能的复合薄膜应用到乙酸气体的检测中。在介绍该气体传感器检测原理的基础上,阐述了实验准备过程,并通过SEM图像和共振频率随时间的响应曲线比较了两种不同制备方法所得到的敏感层的优缺点,实验结果表明超磁致伸缩薄膜可适用于微气体传感器的研究。Giant magnetostrictive film （GMF） is increasingly applied in the design of micro-sensor for its many virtues. One kind of composite film with positive and negative magnetostrictive character was prepared, which was applied in the detection of acetic acid after analyzing the effect factor of resonant frequency. The principle of GMF sensor was introduced, the preparation step of the experiment was explained, and two sensors with different preparation of sensitive layer were compared by SEM figure and response curve of resonate frequency vs. time. The experiment verified that GMF is suitable for the micro gas sensor.

关 键 词：超磁致伸缩薄膜 气体传感器 复合薄膜 共振频率 乙酸 敏感层 

分 类 号：TM271[一般工业技术—材料科学与工程]