光敏型聚酰亚胺对声表面波传输损耗的研究  

Research on the SAW Propagation Loss Resulted from the Photoimageable Polyimide

作　　者：杨莺[1] 朱大中[2] 

机构地区：[1]西安理工大学自动化与信息工程学院,电子工程系,西安710048 [2]浙江大学信息科学与工程学院,信息与电子工程学系,杭州310027

出　　处：《固体电子学研究与进展》2008年第3期471-474,共4页Research & Progress of SSE

基　　金：国家自然科学基金资助项目(60176027);西安理工大学科研启动金资助项目(210604)

摘　　要：采用扰动理论推导了聚酰亚胺薄膜作为声表面波的吸声材料时,声表面波的传输损耗模型。利用网络分析仪对表面涂覆厚5μm光敏型聚酰亚胺薄膜的双声路SAW传感器(中心频率165 MH z)的插入损耗进行测试,对理论模型进行了实验验证。理论结果表明,聚酰亚胺薄膜造成SAW的传输损耗和传感器的中心频率的高低、聚酰亚胺薄膜的厚度以及聚酰亚胺薄膜的宽度成正比。实验测试也证明,聚酰亚胺薄膜对声表面波造成的传输损耗和宽度成正比关系,测得传输损耗为9.5 dB/mm。The propagation loss model of SAW using photoimageable polyimide thin film as an absorber was deduced from perturbation theory. The theoretical model was verified by experiments, that is, using network analyzer to measure the insertion loss of the dual path SAW sensors （center frequency is 165 MHz）covered by 5 μm thick photoimageable polyimide thin film. The theoretical results shown that, the propagation loss of SAW is proportional to the center frequency of the device, the width and thickness of the polyimide thin film. The testing results also indicated that, the propagation loss of SAW is proportional to the width of the polyimide thin film. The measured propagation loss of the SAW is 9.5 dB/mm

关 键 词：声表面波 聚酰亚胺 扰动 损耗 

分 类 号：TN722[电子电信—电路与系统]