并联轴直线运动直线度的检测与误差补偿  

Interferometry Measurement and Errors Compensation of Straightness for Parallel Axis with Straight-line Motion

作　　者：张立新[1] 黄玉美[1] 乔雁龙[1] 

机构地区：[1]西安理工大学机械与精密仪器工程学院

出　　处：《机械工程学报》2008年第9期220-224,共5页Journal of Mechanical Engineering

基　　金：教育部“高等学校博士学科点专项科研基金(20050700007)”;陕西省重大科技创新项目计划(2005ZKC01-01)。

摘　　要：通过采用Renishaw激光干涉仪检测混联机床并联轴直线运动的直线度误差,对直线度的干涉测量原理和方法进行深入探讨,提出一种并联轴直线运动直线度的干涉测量方法和误差补偿模型的建模方法。分析干涉仪直线度评定方法和算法,做出并联轴直线运动直线度双向平均偏差特性曲线,建立直线度误差数学模型。利用最小二乘法拟合得到直线度均值误差补偿模型。对并联轴直线运动直线度进行补偿,达到了提高混联机床几何精度的目的。The straightness for parallel axis with straight-line motion on hybrid NC machine tools is measured by using Renishaw laser interferometer. The interferometry principles and methods of laser interferometry for straightness are studied. An interferometry method and a model building of straightness for straight-line motion with parallel axis are proposed. The method and algorithm for evaluating straightness based on Renishaw laser interferometer are analyzed. The characteristic curve of two -way mean deviation for straightness is plotted. The mathematical model of straightness for parallel axis is derived. The average errors compensation model of straightness is obtained by making use of least squares fitting. Straightness of parallel axis with straight -line motion is compensated and the precision of hybrid NC machine tools is increased.

关 键 词：干涉测量 并联轴 直线度 误差模型 补偿 

分 类 号：TG8[金属学及工艺—公差测量技术]