Si_3N_4陶瓷表面Ni-Ti复合渗镀合金化研究  

Ni-Ti composite diffusion coating on Si_3N_4 ceramic surface

作　　者：张红霞[1] 王文先[1] 崔泽琴[1] 慕伟[1] 

机构地区：[1]太原理工大学材料科学与工程学院,山西太原030024

出　　处：《兵器材料科学与工程》2008年第2期27-30,共4页Ordnance Material Science and Engineering

基　　金：山西省自然科学基金(No.20041052)

摘　　要：在多元离子复合渗镀装置中,采用二元复合靶对 Si_3N_4陶瓷表面进行 Ni-Ti 复合渗镀,实现了 Si_3N_4陶瓷表面的合金化。采用 EDS、SEM、XRD 分析方法和声发射划痕试验对陶瓷表面的渗镀层进行分析。结果表明:渗镀层中含有镍、钛、铁等元素,各元素分布较为均匀,没有明显的成分聚集现象;渗镀层与 Si_3N_4陶瓷基体界面成分过渡连续,没有微观和宏观缺陷。声发射划痕试验结果表明,渗镀层与陶瓷基体结合得较好,在100 N 的最大载荷下,渗镀层没有出现剥离和崩落现象。Using multiple ion composite diffusion coating alloy （MICDCA） technology and Ni-Ti composite target, titanium and nickel were deposited on Si3N4 ceramic surface. The composite diffusion-coating layer was tested by EDS, SEM, XRD and sound emissive scratch test etc. It was indicated that the composite diffusion-coating layer contained such elements as nickel, titanium and iron,etc. Every element distributed uniformly, and there was no obvious composition gathering. XRD result indicated that the diffusion-coating alloy layer was composed of Ni3Ti3O, Ni and NiTi. Sound emissive scratch test （SEST） was used to test the join strength between alloy layer and Si3N4 ceramic, it indicated that no stripped layer was found under the maximum load of 100 N.

关 键 词：多元离子 复合渗镀 Ni—Ti复合靶 SI3N4陶瓷 表面合金化 

分 类 号：TQ174.445[化学工程—陶瓷工业]