Si表面规则纳米结构AFM阳极氧化研究  

Fabrication of regular nanostructures on the surface of Si by AFM anodic oxidation

作　　者：闫永达[1] 张静[1] 孙涛[1] 梁迎春[1] 董申[1] 

机构地区：[1]哈尔滨工业大学机电学院,哈尔滨150001

出　　处：《哈尔滨工业大学学报》2008年第7期1055-1058,共4页Journal of Harbin Institute of Technology

基　　金：国家自然科学基金资助项目(50575058;50275039)

摘　　要：为了研究如何采用AFM探针阳极氧化方法在大范围内加工高精度纳米结构,采用AFM与精密工作台结合建立了一套新型纳米加工系统.该系统中,采用导电探针静止的工作方式,通过AFM系统对其进行垂直表面方向的调节,使探针跟踪表面以及表面产生氧化反应.工作台由外控计算机控制作复杂运动,可以实现矢量和点阵两种加工方法.实验表明:该系统消除了AFM本身扫描陶管由于非线性、迟滞等因素影响其大范围内重复性定位精度不高的缺点.大气环境下,在N型硅(111)表面进行了阳极氧化的实验,得到了探针和样品之间的偏压,加工速度和脉冲时间对氧化物高度的影响规律以及加工纳米线时的极限速度为60μm/s.因此,在本文开发的纳米加工系统上采用阳极氧化的方法可以在大范围内加工出复杂纳米结构如线型结构以及复杂的汉字.To study the fabrication of nanostructures with high precision in a large scale using AFM anodic oxidation, a novel nanomachining system integrating AFM with a high precision stage was developed. The AFM conductive tip was still and the tip motion perpendicular to the sample surface was adjusted by AFM control system. Thus the tip can trace the sample surface and the sample surface can be oxidized. The stage was controlled by an outer computer to perform complex motions. Two types of motion can be realized based on this system： the vector motion and the lattice motion. Results show that the shortcoming of low accuracy of repetitive positioning within a large scale can be overcomed by the nonlinearity and hysteresis of AFM PZT . Anodic oxidation experiments on the surface of N-Si （111）, were carried out in air. Variations of height of oxidation nanostructures influenced by the voltage between the tip and sample, the machining speed and the pulse interval were achieved and the highest machining speed of machining a nanoline was 60 μm/s. Therefore, complex nanostructures such as the line-type structure and Chinese words with a larger scale can be fabricated based on the developed system using the anodic oxidation method.

关 键 词：AFM 阳极氧化 硅 纳米加工 

分 类 号：TN16[电子电信—物理电子学]