陶瓷厚膜力敏传感器  

The Ceramic Thick Film Force Sensitive Transducer and Its Application Prospects

作　　者：常慧敏[1] 马以武[1] 戈瑜[1] 

机构地区：[1]中科院合肥智能机械研究所,合肥230031

出　　处：《自动化仪表》1997年第12期12-15,共4页Process Automation Instrumentation

摘　　要：介绍采用厚膜工艺技术制作陶瓷力敏传感器,详细叙述圆膜片式压力传感器和陶瓷双孔梁式力传感器的工作原理、主要性能、结构设计、制作工艺,展望其应用前景.The ceramic force transducer fabricated with thick film technique is introduced. The operational principle, major specification, structural design, fabrication technique of the round diaphragm type pressure transducer and ceramic dual hole beam type force transducer are described in detail. The application prospect of these transducers is forecasted.

关 键 词：力敏传感器 厚膜应变电阻 陶瓷 传感器 压力 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH823.039[自动化与计算机技术—控制科学与工程]