采用光栅成像原理的光栅位移传感器  

A Grating Displacement Trandsducer Based on the Principle of Grating Imaging

作　　者：蒋静琪[1] 

机构地区：[1]江苏省广播电视大学

出　　处：《仪表技术与传感器》1997年第12期5-7,10,共4页Instrument Technique and Sensor

摘　　要：本文从光栅成像理论出发，导出了具有结构简单，且能在大间隙下工作的光栅成像型位移传感器。并系统地探讨了这种传感器的理论，给出其实验结果。In accordance with the principle of grating imaging,a novel grating displacement transducer is demonstrated in the paper.The transducer will be more simple in its structure components and can be used in the condition of large grating gap.The theory analyses and experiments of the transducer are given in detail in the paper.

关 键 词：光栅 位移测量 光栅成像 光栅位移传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]