集成光学非球面消球差双凸波导透镜的研制  

Development of Integrated Optical Aplanatic Double-convex Aspherical Waveguide Lens

作　　者：恩德[1,2] 徐可欣[1] 陈才和[1] 崔宇明[1] 斯琴[2] 王金武[2] 赵亚兵[2] 

机构地区：[1]天津大学精密仪器与光电子工程学院光电子信息技术科学教育部重点实验室,天津300072 [2]河南理工大学电气工程与自动化学院,河南焦作454003

出　　处：《光电工程》2008年第10期98-101,115,共5页Opto-Electronic Engineering

基　　金：中国博士后科学基金资助项目(2005038468)

摘　　要：针对微透镜制作采用的球透镜研磨,多组分玻璃基板离子交换,结晶化玻璃基板光热法,本文提出非球面消球差双凸波导透镜设计、制备及参数测试方法。该方法根据集成光学原理,研制了一种非球面消球差双凸波导透镜。该透镜数值孔径大,放大倍数高,接近衍射极限,采用光刻、复制工艺,结构简单,一致性好。实验结果表明,NA=0.35,β=6.932,光强分布与理论值一致,达到设计要求。In view of globe lens grinding, multi-component glass substrate ion exchange and crystallization of the glass substrate of light and heat, a method is proposed for designing, manufacturing aplanatic double-convex aspherical waveguide lens and testing its parameter. According to the method based on integrated optical principle, we develop a kind of optical aplanatic double-convex aspherical waveguide lens. It owns large numerical aperture, high magnification, simple structure and good consistency. Furthermore, the lens approaches to diffraction limit and uses light engraving and copying craft. The experimental results that NA= 0.35, β= 6.932 and light distribution corresponding with theoretical results meet the requirements of design.

关 键 词：集成光学 非球面消球差双凸波导透镜 钛扩散铌酸锂 质子交换 衍射极限 

分 类 号：TN256[电子电信—物理电子学]