One-Time Programmable Metal-Molecule-Metal Device  

单次可编程金属-分子-金属器件(英文)

作　　者：商立伟[1] 刘明[1] 涂德钰[1] 甄丽娟[1] 刘舸[1] 

机构地区：[1]中国科学院微电子研究所,北京100029

出　　处：《Journal of Semiconductors》2008年第10期1928-1931,共4页半导体学报（英文版）

基　　金：国家自然科学基金(批准号:60676001,60676008,60236010,60290081);国家重点基础研究发展规划(批准号:2006CB806204)资助项目~~

摘　　要：A one-time programmable metal-molecule-metal device, with a modified Rotaxane LB film as the functional layer, is proposed for potential use in organic programmable and fault tolerant circuits like inorganic anti-fuse devices used in field programmable gate arrays. All fabrication methods involved are low temperature processes, ensuring that this device can be integrated with other organic devices. Electrical measurements show that this device has a good one-time programming capability. Its break down voltage is 2.2V, off-state resistance is 15kΩ, and on-state resistance is 54Ω These characteristics come from the penetration of metal atoms into molecular film under high electronic field.提出了一种单次可编程的金属-分子-金属器件.该器件利用一种经过改良的Rotaxane LB膜作为功能层,可以和应用于场编程门阵列电路中的无机反熔丝器件相比拟,将在有机可编程电路和容错电路等方面有较广泛的应用.所有的加工工艺都是低温工艺,使得该器件可以和其他有机器件集成.电学测试表明该器件有良好的单次编程能力,其击穿电压为2.2V,关态电阻为15kΩ,而开态电阻为54Ω.据分析,这一特性是由非对称的电极结构和金属原子在高电场作用下穿透了分子薄膜所造成的.

关 键 词：molecular device FPGA ROTAXANE PROGRAMMABLE 

分 类 号：TN389[电子电信—物理电子学]