结构紧凑的三维扫描系统及其在光热无损检测中的应用  

A Compact Three-dimensional Scanning Set-up and Application in Nondestructive Detection by PTDS

作　　者：施柏煊[1] 黄晓[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,杭州310027

出　　处：《光学仪器》1997年第6期9-13,共5页Optical Instruments

基　　金：国家自然科学基金

摘　　要：介绍了一种结构紧凑的三维扫描系统，由计算机输入控制参数使步进电机带动三维样品台工作。各纸最大扫描行程25mm，最小扫描步距2μm，全程累计误差小于1μm，该系统已成功地应用于光热偏转无损检测。A compact three-dimensional scanning set-up is described. The three-dimen-sional sample plate is motived by step motors which are controlled by a personal computer.The maximum scanning range of each dimension is 25mm and the minimum step length is 2 μm. The tolerances of whole scanning range are less than 1 μ . The set-up has been suc-cessfully applied in nondestructive detection by photothermal deflection spectroscopy (PTDS).

关 键 词：三维扫描系统 无损检测 光热偏转光谱 

分 类 号：TN203[电子电信—物理电子学] TB302.5[一般工业技术—材料科学与工程]