相移干涉术修正五步算法研究  

Study of Modified Five-frame Algorithm for Phase-stepping Interferometry

作　　者：韦春龙[1] 陈明仪[2] 丁峥 

机构地区：[1]上海大学嘉定校区电子工程系,上海嘉定201800 [2]上海大学嘉定校区机械工程系,上海嘉定201800

出　　处：《光学仪器》1997年第6期14-17,共4页Optical Instruments

摘　　要：研究了修正五步算法对线性相移误差及探测器二次非线性响应误差的不灵敏特性。数值模拟结果表明，该算法在一定程度上优于B.Zhao＆Y．Sur－rel的六步算法。A modified five-frame algorithm based on Hariharan's five-frame algorithm is studied. The numerical simulations show that the algorithm is insensitive to the effect of ref-erence phase error and second order detector nonlinearity error. It is better than B. Zhao and Y. Surrel's six-frame algorithm to some extent.

关 键 词：干涉术 相移算法 修正五步算法 相移干涉 

分 类 号：O436.1[机械工程—光学工程]