利用射频与高压直接耦合等离子体注入进行不锈钢表面改性  

Plasma Implantation into Stainless Steel Based on Direct Coupling of Pulsed Radio Frequency and Pulsed High Power

作　　者：巩春志[1] 田修波[1] 杨士勤[1] 

机构地区：[1]哈尔滨工业大学材料学院现代焊接生产技术国家重点实验室,哈尔滨150001

出　　处：《微细加工技术》2008年第4期14-18,共5页Microfabrication Technology

基　　金：国家自然科学基金资助项目(10775036;50773015);哈尔滨市科技创新人才研究专项基金资助项目(2006RFXXS012);新世纪优秀人才支持计划项目

摘　　要：介绍了一种新的等离子体离子注入在不锈钢表面改性上的应用。将高压脉冲和射频脉冲直接耦合到工件上,不需外部等离子体源,利用工件自身加射频产生等离子体,随后施加高压对不锈钢表面进行了注氮处理。XPS分析显示,在基体表面有氮元素存在,说明实现了射频与高压直接耦合的离子注入效果。进一步研究表明,等离子体离子注入后,在不锈钢基体表层形成了Cr2O3以及CrN,FeN等硬质相,因此处理后的试件耐摩擦、磨损和耐腐蚀性能得到了较大提高。同时研究显示,射频脉冲宽度或射频与高压相位的改变对摩擦系数影响不大。A new technique to treat stainless steel based on hybrid plasma ion implantation coupling radio frequency and high voltage （HV） pulses is utilized. In this technique, RF pulse for plasma generation and the high voltage pulse is combined using a single cable without need of external plasma source. Nitrogen plasma ion implantation is performed using this technique. The XPS results show that there exists nitrogen element in implanted layer indicating the validity of plasma implantation based on coupling of RF and pulsed highvoltage. The phases, such as Cr2O3, CrN and FeN are formed in the nitrogen implanted layers. This leads to the substantial improvement of wear resistance and corrosion resistance. The results also demonstrate that the influence of RF pulse width or RF and HV interval on friction coefficient is slight in our experiments.

关 键 词：射频 高压 耦合 等离子体离子注入 不锈钢 

分 类 号：TN305.2[电子电信—物理电子学]