30．4nm极紫外成像探测器的实验研究  

Experimental Study on 30.4 nm Extreme Ultaviolet Imaging Detector

作　　者：朱香平[1] 赵宝升[1] 刘永安[1,2] 缪震华[1,2] 张兴华[1,2] 邹玮[1] 

机构地区：[1]中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室,陕西西安710119 [2]中国科学院研究生院,北京100039

出　　处：《光学学报》2008年第10期1925-1929,共5页Acta Optica Sinica

基　　金：中国科学院知识创新方向性项目(061Z291213)资助课题

摘　　要：报导了最新研制的30.4 nm极紫外成像探测器的实验研究结果。该探测器采用了楔条形阳极(WSA)、高增益V型级联微通道板组件、低噪声电子读出系统等先进技术,利用单光子计数成像技术在实验室成功获得了模拟图像。搭建了相应的实验系统,对探测器成像的线性度、空间分辨率、暗计数等性能进行了实验研究。结果表明,该探测器具有45 nm的有效面积,空间分辨率优于100μm,暗计数率低[0.4 count/(cm2.s)]、成像线性度好、结构简单等优点。The experimental result of the newly developed 30. 4 nm extreme ultraviolet imaging detector was reported in detail, which adopted wedge strip and zigzag anode （WSA）, V-stack high-gain microchannel plate （MCP） components, low-noise electronic readout system, and other advanced techniques. Simulated images were obtained successfully by using the single-photon counting imaging technique in the laboratory. The experimental setup system was established and the detector imaging linearity, resolution, the dark count rates etc are studied. The research shows that the detector has an effective area of 45 mm in diameter, spatial resolution better than 100 /~m, and low dark count rates about 0.4 count/（cm^2 · s）, with good image linearity and simple structure.

关 键 词：探测器 紫外探测 30.4 nm极紫外 单光子计数成像 微通道板 楔条形阳极探测器 

分 类 号：TN23[电子电信—物理电子学] O434.2[机械工程—光学工程]