三种不同后处理方式对ZrO_2薄膜性能的影响  

Influence of Three Post-Treatment Methods on Properties of ZrO_2 Thin Films

作　　者：王聪娟[1] 晋云霞[1] 邵建达[1] 范正修[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800

出　　处：《中国激光》2008年第10期1600-1604,共5页Chinese Journal of Lasers

基　　金：国家自然科学基金(60608020)资助项目

摘　　要：采用有氧热处理、激光预处理和离子后处理三种方式对电子束蒸发(EBE)制备的单层ZrO_2薄膜进行了后处理,并分别对样品的光学性能和抗激光损伤阈值(LIDT)特性进行了研究。实验结果表明,热处理方式可以有效排除膜层内吸附的水气,弥补薄膜制备过程中的氧损失,使得光谱短移、吸收减小、损伤阈值增高;激光预处理过程可以在一定程度上减少缺陷、提高损伤阈值,但对膜层的光谱和吸收情况没有明显的改善作用;而离子后处理能够提高膜层的堆积密度、减少缺陷、降低吸收从而提高损伤阈值。由于三种方式处理机制不同,在实际应用中应根据膜层的性能选择合适的处理方式。Heat treatment with oxygen, laser conditioning and ion post-treatment were post processed respectively on ZrO2 single layers deposited by electron beam evaporation （EBE）. Optical properties and laser-induce damage threshold （LIDT） of the films were studied. It is found that heat treatment can get rid of the hydrosphere adsorbed in the coating, offset the lost of oxygen in the deposition, which leads to a short shift of spectra curve, a decrease of absorption and an increase of LIDT. Laser pretreatment could wipe off the defects at a certain extent and increase the LIDT, but has no use in spectrum and absorption. And ion post-treatment could increase the stack density, lessen the defects, reduce the absorption and improve the LIDT. Each method has its own treat mechanism, and the most suitable method should be chosen according to the characteristics of the coatings.

关 键 词：薄膜 氧化锆 抗激光损伤阈值 退火 激光预处理 离子后处理 

分 类 号：O484[理学—固体物理]