真空度对环形行波超声马达驱动特性的影响  

The Effect of Vacuum on Driving Properties of Ring Type Ultrasonic Motor

作　　者：曲建俊[1] 周宁宁[1] 田秀[1] 金龙[2] 徐志科[2] 

机构地区：[1]哈尔滨工业大学机电工程学院,黑龙江哈尔滨150001 [2]东南大学电气工程系,江苏南京210096

出　　处：《压电与声光》2008年第6期702-704,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50575055);国家重点基础研究发展“九七三”计划基金资助项目(2007CB607602)

摘　　要：超声马达是一种适合于真空环境中工作的理想驱动器,但其在真空下的特性研究较少。利用真空试验机和超声马达特性模拟实验台,分别在常压、低真空和高真空下测试了无磁型和普通型环形行波超声马达的转速和转矩特性。结果表明,两台超声马达的转速和转矩均随环境压强减小而减小;在真空下,普通型超声马达的负载特性较常态下差,无磁型超声马达负载特性受真空度影响较小,且优于普通型超声马达的负载特性。运用声悬浮和摩擦学理论初步分析了产生此现象的原因。Ultrasonic motor （USM） is one of the promising actuators that are utilized under vacuum conditions. There are a few studies on it in vacuum. Properties of rotational speed and torque of nonmagnetic and common ring type traveling wave ultrasonic motors in normal, low vacuum and high vacuum were studied respectively by using vacuum tester and simulating tester of USM＇s properties. It was found that both rotational speed and torque of the two USMs decreased as the environment pressure decreased. Under vacuum condition, the load properties of common USM were worse than those under normal condition. The load properties of nonmagnetic USM were affected a little by environment pressure. Nonmagnetic USM had better load properties than common USM. Acoustics suspension and tribology theories were applied to primarily analyze these phenomena.

关 键 词：超声马达 真空 负载特性 

分 类 号：TM356[电气工程—电机] TM359.6