生物/化学微传感器技术和应用(一)  

Microfabrication Techniques for Chemical/biosensors and Applications(1)

作　　者：史永基[1] 高雅利[2] 

机构地区：[1]洛阳理工学院 [2]洛阳理工学院自动化系

出　　处：《传感器世界》2008年第10期6-11,共6页Sensor World

摘　　要：本文综述了生物/化学微传感器的技术和应用,详细描述了起源于半导体技术的标准工艺流程和制造三维机械结构的特殊微细机加工工艺,给出了基本化学传感器原理和对应的化学/生物传感器应用实例,最后提出了单片集成化学/生物微传感器系统,包括单一芯片上传感器结构和运转电路。Micro-fabrication processes for chemical and biochemical sensors are reviewed. Standard processing steps originating from semiconductor technologies are detailed, and specific micromachining steps to fabricate three-dimensional mechanical structures are described. Fundamental chemical sensors principles are briefly abstracted and corresponding state-of-the-art examples of micro-fabricated chemical sensors and biosensors are given. Finally, monolithic integrated chemical and biological micro-sensor systems are presented, which include transducer structures and operation circuitry on a single chip.

关 键 词：化学/生物传感器 CMOS IC技术 集成传感器 微电子机械系统(MEMS) 微制造技术 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置] TP212.3[自动化与计算机技术—控制科学与工程]