固体电解质硫化氢气体传感器的特性研究  

Study on Characteristics of NASICON Solid-Electrolyte H_2S Gas Sensor

作　　者：钟铁钢[1] 梁喜双[1] 刘凤敏[1] 全宝富[1] 卢革宇[1] 

机构地区：[1]集成光电子国家重点实验室吉林大学实验区吉林大学电子科学与工程学院,长春130012

出　　处：《传感技术学报》2008年第10期1674-1677,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目资助(60574096)

摘　　要：采用溶胶-凝胶法制备NASICON(钠离子导体)固体电解质及镍/钛复合氧化物材料。并以NASICON为离子导电层,镍/钛复合氧化物为敏感电极制作固体电解质硫化氢气体传感器。在260-380℃温度范围内,以镍/钛复合氧化物为敏感电极制作的器件对1.10-6～100.10-6硫化氢具有良好的敏感特性。在320℃时器件的灵敏度(斜率)为-72.4mV/decade。并且器件具有良好的选择性、抗湿性及响应恢复特性。器件对5.10-6,50.10-6硫化氢的响应时间为10s,4s和20s,40s。最后对器件的敏感机理做了分析。NASICON （sodium super ionic conductor） solid-electrolyte and Ni/Ti compound oxide materials were prepared by sol-gel method. And solid-electrolyte H2S gas sensor was fabricated with NASICON as the ion electric layer and Ni/Ti compound oxide as the sensing electrode. The sensor using Ni/Ti compound oxide as the sensing electrode exhibited well sensing performances to 1 ·10^-6 -100· 10^-6 H2S at 260-380℃. The sensitivity （slope） of the sensor was -72.4 mV/decade at 320℃. Also the sensor exhibited well selectivity, resistance against water humidity and response-recovery characteristics. The response time of the sensor to 5 · 10^-6, 50· 10^-6 H2S was 10 s,4 s and recovery time was 20 s,40 s, respectively. At last the sensing mechanism of the sensor was investigated.

关 键 词：气体传感器 固体电解质 硫化氢 镍/钛复合氧化物 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]