N-羟基-3,6-内氧桥-4-环己烯二甲酰亚胺对甲苯磺酸酯的合成及性能研究  

Synthesis and Performance of the N-hydroxymal-eimide Adduct of Furan Methylic Sulfonate

作　　者：王霞[1,2] 李平[2] 

机构地区：[1]铜仁学院生化系,贵州铜仁554300 [2]华中科技大学化学与化工系,湖北武汉430074

出　　处：《山东科技大学学报（自然科学版）》2008年第5期90-93,共4页Journal of Shandong University of Science and Technology(Natural Science)

基　　金：广东省科技攻关项目(2006B11801004)

摘　　要：以马来酸酐、呋喃、盐酸羟胺和对甲苯磺酰氯为起始原料,合成了一种新的非离子型产酸剂N-羟基-3,6-内氧桥-4-环己烯二甲酰亚胺对甲苯磺酸酯,优化了中间产物的合成条件,通过红外表征测定了中间产物和最终产物的化学结构;测定了产物在常用有机溶剂中的溶解性,并通过紫外表征测定了其紫外吸收性。实验结果表明,该产物在常用有机溶剂中具有良好的溶解性,并在248 nm波长处有好的透明性,可用于248 nm光刻工艺体系。The N-hydroxymal-eimide adduct of furan methylic sulfonate is synthesized from maleic anhydride, furan, hydroxylamine hydrochloride and p-toluenesulfonyl chloride. The synthesis conditions of the intermediate product are optimized. The product chemical structures are characterized by FT-IR, the solvent and the UV absorption properties are measured. The experiments show that N-hydroxymal-eimide adduct of furan methylic sulfonate is of good trans- parence in 248 nm wavelength and good solubility in organic solvents. So it is a good potential photoacid generator （PAG） in the deep-UV 248nm photoresist system.

关 键 词：酰亚胺 苯磺酸酯 产酸剂 

分 类 号：O69[理学—化学]