MOD法在La_(0.47)Sr_(0.53)TiO_3/LaAlO_3上沉积YBa_2Cu_3O_(7-σ)超导层的研究  

Research on preparation of YBa_2Cu_3O_(7-σ) layers on the structure of La_(0.47)Sr_(0.53)TiO_3/LaAlO_3 by MOD

作　　者：高锋[1] 李凤华[1] 王娜[1] 李英楠[1] 樊占国[1] 

机构地区：[1]东北大学材料与冶金学院,辽宁沈阳110004

出　　处：《功能材料》2008年第10期1662-1664,1668,共4页Journal of Functional Materials

基　　金：国家自然科学基金委员会“青年科学基金”资助项目(50702012);辽宁省博士启动基金资助项目(20071017)

摘　　要：实验通过无氟的金属有机物液相沉积法在单晶LaAlO3(LAO)基底上生长La1-xSrxTiO3缓冲层,之后在其上生长YBa2Cu3O7-σ(YBCO)超导层,这种制备方法与真空沉积法和三氟乙酸金属有机物沉积法相比,具有成本低、效率高和环境友好等优点,对YBCO涂层导体的实际应用更具有研究价值。X射线衍射(XRD)结果表明,在LAO基底上生成了纯净的La1-xSrxTiO3膜,在La1-xSrxTiO3/LAO结构上生成了单相的YBCO膜,构成两种膜的晶粒均具有沿垂直于基底表面的c轴方向择优生长;通过半定量的能谱分析(EDS)确定缓冲层La1-xSrxTiO3为La0.47Sr0.53TiO3相,表明部分La元素挥发;扫描电子显微镜(SEM)结果表明在LAO基底上生成的La0.47Sr0.53TiO3膜平整光滑;在La0.47Sr0.53TiO3/LAO结构上生长的YBCO成膜颗粒聚集成片状,相互叠加生长,形成平行于基底表面的超导层。The buffer layer of La1-xSrxTiO3 （LSTO） was first deposited on the sub strate LaAlO3 （100）（LAO） by fluorine-free metal organic deposition （MOD） which was economical, effective and environmental friendly compared with vacuum depositions. Then the superconductive layers of YBCO were prepared on the structure of LSTO buffered LaAlO3 by the same method. By XRD analysis, pure LSTO and YBCO films were prepared respectively on the LAO substrate and the structure of LSTO/LAO,which all exhibited c-axis-oriented peaks in direction perpendicular to the surface of substrate. In terms of semi-quantitative energy dispersion spectrum （EDS） analysis, the phase of the buffer layer film was defined as La0.47 Sr0.53 TiO3, which indicated the partial volatilization of the element of La in the process of heat treatment. By SEM observation, the buffer layer of LSTO prepared on the substrate LAO was flat and smooth. The flake-shaped grains in YBCO film were stacked to grow into superconductive layer in direction perpendicular to the surface of the substrate.

关 键 词：La1-xSrxTiO3 MOD YBCO 缓冲层 涂层导体 

分 类 号：TM262[一般工业技术—材料科学与工程]