基于MEMS的微引信谐振器系统级设计  

System-Level Design of Micro-Fuse Resonator Based on MEMS

作　　者：国蓉[1] 王小娟[1] 王伟[1] 

机构地区：[1]西安工业大学光电工程学院,陕西西安710032

出　　处：《兵工自动化》2008年第11期3-5,9,共4页Ordnance Industry Automation

基　　金：武器装备预研基金项目(9140C360502060C36)

摘　　要：在微机电系统集成设计平台—MEMS Garden基础上,搭建MEMS微引信谐振器的系统级模型,并利用有限元仿真计算2种方法并对模型进行有效性验证,完成谐振器的结构设计,再由仿真得到结构性能参数。研究结果表明,采用系统级方法进行MEMS器件的设计能够在确保求解精度的前提下,显著提高设计效率,缩短设计周期,减小设计成本;所设计的MEMS微引信谐振器的各项性能指标完全能满足引信安全系统的应用要求。A system-level model of micro-fuse resonator was accomplished by utilizing integrated design platform MEMS garden. Use the finite element simulation method to calculate 2 methods and test the model validity. The structural design of micro-fuse resonator was finished and the structural performance parameters were obtained by simulation. Results show that system-level method can be applied for the design of other MEMS devices to greatly improve the efficiency, reduce designing period and decrease the cost while maintaining a considerable computing accuracy. And the performance of the given micro-fuse resonator can meet requirements of common safety system applications.

关 键 词：微引信谐振器 系统级设计 微机电系统集成设计平台 

分 类 号：TJ430[兵器科学与技术—火炮、自动武器与弹药工程] TP391.9[自动化与计算机技术—计算机应用技术]