制作微结构的超声复合加工机理  

Mechanism of Ultrasonic Combined Machining for Micro-Structures

作　　者：朱永伟[1] 王占和[1] 范仲俊[1] 

机构地区：[1]扬州大学机械工程学院,扬州225001

出　　处：《宇航材料工艺》2008年第5期61-66,共6页Aerospace Materials & Technology

基　　金：国家自然科学基金项目(50675192);江苏省研究生科研创新计划项目(CX07S_022z)

摘　　要：提出了制作微结构的超声复合加工方法,分析了超声、超声复合电火花、超声复合电解微细加工机理。用微细放电组合工艺制作了多种截形微细工具电极;完善试验系统,进行了多种材料、形状微结构超声复合加工试验。结果表明:超声加工是制作硬脆材料微结构的有效方法;超声复合电火花制作金属材料微结构有较好的精度及加工稳定性;超声复合电解加工兼有效率高、精度好的技术优势。The methods of ultrasonic combined machining micro-structures are described. The micro-machining mechanism and characteristics of ultrasonic combined machining were analyzed. Several kinds of cathodes with different sections were manufactured by combined electro-discharge micro-machining. The micro-machining system was built and improved. The micro-structures were manufactured by combined ultrasonic machining. It is proved that ultrasonic machining is an effective method for micro-structures of hard and brittle materials. Good precision and machining process stability can be obtained by ultrasonic combined electric-discharge machining micro-structures of hard and tough metal materials. Good precision and high productivity can be obtained by ultrasonic combined electrochemical machining.

关 键 词：微结构 超声加工 电火花加工 电解加工 复合微细加工 

分 类 号：TG663[金属学及工艺—金属切削加工及机床] TB303[一般工业技术—材料科学与工程]