Ln0.5Sr0.5CoO3-δ阴极薄膜材料的XRD和XPS研究  

XRD and XPS Study of Ln_(0.5)Sr_(0.5)CoO_(3-δ) Cathode Thin Film

作　　者：张利文[1] 丁铁柱[1] 王强[1] 朱志强[1] 赵倩[1] 姜涛[1] 

机构地区：[1]内蒙古大学稀土材料重点实验室

出　　处：《稀土》2008年第5期5-9,共5页Chinese Rare Earths

基　　金：国家自然科学基金项目资助(10464001);内蒙古大学513人才计划项目资助

摘　　要：采用离子束溅射法在氧化钇稳定的氧化锆(YSZ)衬底和铝酸镧(LaAlO3)衬底上溅射Ln0.5Sr0.5CoO3-δ(Ln=La,Pr,Nd)薄膜。测试了不同工艺制备的Ln0.5Sr0.5CoO3-δ薄膜的XRD谱和XPS谱,研究了不同衬底上Ln0.5Sr0.5CoO3-δ薄膜微结构及化学状态。结果表明,在YSZ衬底上制备的Ln0.5Sr0.5CoO3-δ薄膜氧空位浓度相应的高于在LaAlO3衬底上的氧空位浓度,Nd0.5Sr0.5CoO3-δ/YSZ薄膜的氧空位浓度最高,有利于提高氧离子的输运性。Thin films of Ln0.5Sr0.5CoO3-δ（Ln=La,Pr,Nd） nominal composition were grown on yttria-stabilized zirconia（YSZ） and LaAlO3（LAO） single crystal substrates by ion-beam sputtering deposition method.The x-ray diffraction（XRD） spectra and X-ray photoelectron spectroscopy（XPS） were measured for Ln0.5Sr0.5CoO3-δ（Ln=La,Pr,Nd） thin films.The surface microstructures of Ln0.5Sr0.5CoO3-δ thin films on various substrates and chemical states were studied.The results show that the oxygen vacancies of Ln0.5Sr0.5CoO3-δ thin films deposited on YSZ substrate is bigger than that deposited on LAO（100） substrate.The oxygen vacancies is the biggest for Nd0.5Sr0.5CoO3-δ/YSZ thin film.It is of benefit to enhancing the oxygen ionic transport properties.

关 键 词：Ln0.5Sr0.5CoO3-δ薄膜 XRD XPS 微结构 

分 类 号：O614.33[理学—无机化学] O484[理学—化学]