热声焊机变幅杆固有频率模态分析  

Intrinsic Frequency Modal Analysis of Amplitude Horn in Thermosonic Bonder

作　　者：晁宇晴[1,2] 杨兆建[2] 乔海灵[1] 董永谦[1] 

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024 [2]太原理工大学,山西太原030024

出　　处：《电子工艺技术》2008年第6期352-354,357,共4页Electronics Process Technology

摘　　要：纵向振动单一超声变幅杆是热声焊机换能器中的关键零件,其作用是放大换能器所获得的超声振动振幅。为了得到最大的振动幅值,变幅杆固有频率应和超声波发生器的工作频率相同。运用ANSYS有限元分析软件进行了不同材料下的变幅杆固有频率的模态分析,验证了1Cr18N i9Ti不锈钢的变幅杆的纵振固有频率与工作频率相一致,给出了纵振模拟图和位移图,并对模态分析结果进行了研究,以了解在给定的频率范围内各种模态形式,通过采取一定方式抑制接近工作频率的影响键合质量的非工作模态产生。Longitudinal vibration single ultrasonic amplitude horn is the key part of the transducer in the thermosonie bonder. It can amplify the ultrasonic amplitude in the transducer. Its intrinsic frequency should be equal to working frequency for the obtainment of maximum amplitude. The modal analysis meth- od of finite element is used to analyze the intrinsic frequency of amplitude horn with different materials in this paper. The intrinsic frequency of 1Crl8Ni9Ti stainless steel amplitude horn is equal to working frequency. Longitudinal vibration analog charts are presented. Analogue results are analyze so as to understand a variety of modality under the given frequency range. Harmful modality approach to working frequency should be controlled by taking some measures so as not to affect bonding quality.

关 键 词：变幅杆 固有频率 有限元 模态分析 

分 类 号：TG43[金属学及工艺—焊接]