用残余气体分析仪测量和计算分压强  

Measuring and Calculating the Partial Pressures with Residual Gas Analyzer

作　　者：肖琼[1] 彭晓华[1] 

机构地区：[1]中科院高能物理研究所,北京100049

出　　处：《真空电子技术》2008年第5期16-17,21,共3页Vacuum Electronics

摘　　要：残余气体分析仪可以得到真空系统残余气体的质谱图,并给出各个质荷比峰的离子流值,但不能直接测量残余气体中各组分气体的分压强。在考虑到组分气体对某个峰的贡献可以线性叠加的基础上,本文介绍了峰的离子流与分压强、仪器灵敏度、传输几率和丰度之间的关系,从而得到了利用RGA质谱峰的离子流计算残余气体分压的公式。Residual Gas Analyzer can get the mass spectrum of residual gases in the vacuum system and give the ion currents of the mass peaks. But it can＇t measure the partial pressure of each component gas directly. On the grounds of that the contributions of the component gases to a peak can be linearly superposed, this paper introduces the relations between the ion currents of mass peaks and the partial pressures along with the sensitivity of instrument, the transmission factors and the abundances, and then derivates the formulas of calculating partial pressures with ion currents of mass peaks.

关 键 词：残余气体分析 离子流 分压强 真空系统 电子倍增器 

分 类 号：TN107[电子电信—物理电子学]