GeSi/Si异质结光波导光栅耦合器的设计与模拟  

Design and Simulation of the the GeSi/Si Heterostructure Optical Waveguide Grating Coupler

作　　者：徐勤昌[1] 刘淑平[1] 

机构地区：[1]太原科技大学,山西太原030024

出　　处：《量子光学学报》2008年第4期453-458,共6页Journal of Quantum Optics

基　　金：山西省自然科学基金(2007011047)

摘　　要：GeSi/Si异质结光波导是硅基光电集成(OEIC)领域一种重要的连接器件,研究其光的输入耦合,提高耦合效率有着重要的意义。通过分析导模—辐射模的耦合理论求得光栅耦合器的辐射损耗系数,设计分析了波导层厚度为2500 nm,入射波长为1300 nm的单模Ge0.05Si0.95/Si异质结波导光栅耦合器的周期、长度和槽深,得出从空气中输入角为75°(从衬底中入射角为16°)时,周期为0.512μm,槽宽为0.256μm,光栅长度为2.3 mm,从空气侧输入时耦合效率为22.5%,从衬底输入时耦合效率为46.3%,并对其输入、输出光场进行了数值模拟。domain of For the GeSi/Si heterostructure optical waveguide is a kind of important connective device in the sillica optoelectronic integrated circuits, there is important significance in researching its light improve its coupling efficiency. The radiation decay factor is concluded by analysing the coupling theories of the guided mode-the radiating mode. The coupling length the period and the groove depth of the Ge0.5 Si0.95/Si heterostructure optical waveguide grating coupler are designed and analyzed. The guide thickness is 2500 nm and wavelength is 1300 nm. The results are as following： when the incident angle is 75°in air （the incident angle is 16° in the substrate） , the period is 0. 512μm, the groove width is 0. 256μm, the coupling length is 2.3 mm, the coupling efficiecy in air is 22.5 % , the coupling efficiency in the substrateis 46.3 % , and the numerical simulation of the electronic field of the input guided mode and the output mode are given.

关 键 词：GeSi/Si异质结 光电集成 光栅耦合器 

分 类 号：O431[机械工程—光学工程]