基于微机电系统工艺的微型左右手复合传输线宽带滤波器  

Micro Composite Right/Left-handed Wideband Filter Based on MEMS Technology

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作  者:黄闯[1,2] 陈迪[1,2] 靖向萌[1,2] 陈翔[1,2] 刘景全[1,2] 朱军[1,2] 魏文婕[3] 魏泽勇[3] 李宏强[3] 

机构地区:[1]上海交通大学微米纳米加工技术国家级重点实验室,上海200240 [2]上海交通大学微纳科技研究院,上海200240 [3]同济大学物理系,上海200092

出  处:《机械工程学报》2008年第11期59-63,共5页Journal of Mechanical Engineering

基  金:上海市科委重点基础研究资助项目(05JC14061)

摘  要:设计并采用微机电系统工艺加工制备了一种微型左右手复合传输线宽带滤波器。器件主要结构由两条平行的金属蛇形线构成,蛇形线的末端接有金属圆片作为接地单元。蛇形线对产生左右手电感和电容。通过改变蛇形线的单元数目,即可改变器件的工作频率,并且,该复合传输线单周期即可体现左手材料特性。给出了器件的电磁场仿真结果,可以看到在左手频带中磁场沿着与能量相反的方向传输,测试结果得出8单元样品通带范围为0.99~2.09 GHz,中心频率为1.54 GHz,相对3 dB宽度为71.42%。4单元样品通带范围1.84~3.36 GHz,中心频率为2.60 GHz,相对3 dB宽度为58.46%。A novel micro composite right/left-handed(CRLH)wide band filter based on micro electromechanical system(MEMS) technology is designed and fabricated. This wide band filter has two parallel meander lines. Two circular patches are used as the ends of the lines respectively, which are used to connect with the ground. Compared with the other designs, a relatively large inductance can be obtained by the meander lines, and also, left hand property can be shown by single period. This avoids increasing length of the device of multi periods. The working frequency can be changed by different numbers of cells. The simulation results of electro magnetic field are also given, which show that the magnetic field flow backward in the left hand region, just transmitting to the opposite direction of energy flow. Measurement results show that the passband of 8 units is 0.99~2.09 GHz, center frequency is 1.54 GHz, the bandwidth relative to 3 dB is 71.42%. The passband of 4 units is 1.84~3.36 GHz, center frequency is 2.60 GHz, the bandwidth relative to 3 dB is 58.46%.

关 键 词:左右手复合传输线 宽带滤波器 左手材料 

分 类 号:TN603.5[电子电信—电路与系统]

 

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