小口径玻璃透镜热压成形模具的超精密微细磨削加工  

Fabrication of Micro Glass Lens Mould by Using Ultra-precision Micro-grinding Process

作　　者：尹韶辉[1] 唐昆[1] 朱勇建[1] 陈逢军[1] 

机构地区：[1]湖南大学国家高效磨削工程技术研究中心,长沙410082

出　　处：《中国机械工程》2008年第23期2790-2792,2811,共4页China Mechanical Engineering

基　　金：国家重点科技支撑计划资助项目(2007BAF29B03);国家863高技术研究发展计划资助项目(2006AA04Z335);国家自然科学基金资助项目(50675064)

摘　　要：对小口径玻璃透镜热压成形模具的超精密平行磨削进行了试验研究,并对加工过程中的形状误差补偿技术进行了探讨。结合超精密平行磨削技术和形状误差补偿技术,选用经精密整形和修锐的微小砂轮,对直径和曲率半径均为10mm的小口径透镜模具样品进行了加工试验。试验获得的加工表面的表面粗糙度Ra=5.98nm、Rz=34.95nm,形状精度峰谷值为113nm、均方根值为23nm,其形状精度峰谷值及均方根值均较误差补偿之前有明显减小,加工过程中的残余形状误差得到了有效的修正和补偿,加工精度得到提高。This paper dealt with ultra-precision parallel grinding technique of micro glass lens mould and investigated form error compensation technique in grinding process. Based on the above two means, grinding tests of micro-lens mould with 10mm in diameter and curvature radius were conducted by micro wheels after precision truing and dressing. Surface roughness of Ra= 5.98nm, Rz = 34.95nm are obtained,and form errors of peak-valley value and root mean square value are 113nm and 23nm respectively. The experimental results show that the values of peak-valley and root mean square are reduced obviously after the error compensation, the residual form errors resulted from machining process are modified and compensated, and the machining precision is improved.

关 键 词：小口径透镜模具 超精密 平行磨削法 形状误差补偿 

分 类 号：TG580[金属学及工艺—金属切削加工及机床]