玻璃基多模波导光功分器的研制  

Fabrication of glass-based multimode optical power splitters

作　　者：潘剑侠[1] 高阳[2] 李忆[2] 郝寅雷[2] 李锡华[2] 江晓清[2] 王明华[2] 杨建义[2] 

机构地区：[1]杭州电子科技大学微电子CAD研究所,杭州310018 [2]浙江大学微电子与光电子研究所,杭州310027

出　　处：《光电子．激光》2008年第12期1587-1591,共5页Journal of Optoelectronics·Laser

基　　金：国家重点基础研究发展计划课题资助项目(2007CB307003);浙江省151人才工程支持项目

摘　　要：利用Ag+-Na+电场辅助玻璃基离子交换技术制作了低损耗的掩埋多模波导,并在此基础上研制了多模波导光功分器。测试分析了多模波导和光功分器的损耗和偏心率特性。所研制的多模直波导传输损耗小于0.1dB/cm,所制作的1×2的多模波导光功分器附加损耗小于1.3 dB。A low-loss glass-based buried multimode waveguide is fabricated by using the rield-assisted Ag^＋- Na^＋ ion-exchange technique,and multimode optical power splitters are fabricated and demonstrated. The loss and the off-center impact of the multimode waveguides and optical power splitters are measured and analyzed in details. The measured loss of the multimode waveguides are lower than 0.1 dB/cm,and the additional loss of the multimode optical power splitters are lower than 1.3 dB.

关 键 词：多模波导 多模功分器 离子交换技术 玻璃 集成光学 

分 类 号：TN256[电子电信—物理电子学]