氧分量对柔性衬底上WO_x薄膜性能的影响  

Effect of oxygen pressure on properties of WO_x thin films deposited on soft substrate

作　　者：唐武[1] 范芸[1] 李海霞[1] 翁小龙[1] 邓龙江[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《功能材料》2008年第12期1968-1970,1973,共4页Journal of Functional Materials

摘　　要：通过射频磁控溅射方法,在柔性PET衬底上低温沉积电致变色WOx薄膜。利用X射线衍射(XRD)、紫外-可见光分光光度计、X射线光电子能谱(XPS)分析所制备薄膜的微观结构、透光率、O元素的结合状态。结果表明,各氧分量下制备的WOx薄膜均为非晶态;氧分量0时制备的薄膜着、退色态透光率变化范围达到25%左右,具有较好的电致变色性能;XPS分析表明氧分量8%时氧空位含量最低,随着氧分量的继续增大,氧空位含量也增大。WOx films were deposited on polyethylene terephthalates （PET） soft substrate by RF magnetron sputtering at room temperature. The microstructure, transmittance and the binding energy of O element in WOx films were analyzed by X-ray diffraction （XRD）, UV-vis spectroscopy and XPS, respectively. It can be found that all the WOx films are amorphous. The variation of transmittance in colored and bleached WOx films reached the maximum value 25% at oxygen concentration 0%, which indicated that the electrochromic property was best. The XPS analysis revealed that the oxygen vacancy content was lowest at the oxygen concentration 8%, and the oxygen vacancy content increased with the increasing oxygen concentration.

关 键 词：WOx薄膜 低温沉积 电致变色 射频磁控溅射 

分 类 号：O484.4[理学—固体物理]