基于微模塑复制技术的聚合物微悬臂梁的研制  

Fabrication of Micro-cantilever Based on Micro-molding Replication Techniques

作　　者：白英良[1,2] 段辉高[3] 韩立[1] 

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院研究生院,北京100093 [3]兰州大学电子材料研究所,兰州730170

出　　处：《微细加工技术》2008年第5期35-36,40,共3页Microfabrication Technology

摘　　要：首先用电火花技术制作出不锈钢基座和悬臂梁,然后利用PDMS良好的柔性、弹性、复制分辨率以及良好的透气性能制作了过渡模版,通过二次复制的图形转移技术,制作了聚合物微悬臂梁。测试表明,所制作的聚合物悬臂梁基本满足悬臂梁工作的要求,利用该微模塑复制技术制备聚合物微悬臂梁的方法工艺简单、成本低、可批量生产,同时避免了刚性脱模带来的难题。根据实验,还给出了中温注射、低温固化、高温后固化的最佳工艺方法。The micro-molding process for fabricating polymeric cantilever was presented. The PDMS master mold for cantilever was replicated from a stainless steel cantilever which was fabricated by electro-spark machining. The problem that it is difficult to remold rigidly was solved in this process because PDM S has excellent flexibility, elasticity, replication resolution, and good gas permeation. The optimal molding method is injecting at medium temperature, curing at room temperature and post curing at high temperature. After coating a thin Au layer, the cantilever was tested in SPM, which showed that it met the need of the cantilever.

关 键 词：微悬臂梁 微模塑 聚合物 PDMS 固化 

分 类 号：TN3[电子电信—物理电子学]