中心波长121．6nm的真空紫外窄带滤光片设计和制备  

Design and Preparation of Narrowband Filter with Central Wavelength 121.6 nm in Vacuum Ultraviolet Region

作　　者：付联效[1] 吴永刚[1] 郑秀萍[1] 王振华[1] 彭东功[1] 焦宏飞[1] 曹鸿[1] 吕刚[1] 周洪军[2] 霍同林[2] 

机构地区：[1]同济大学精密光学工程技术研究所,上海200092 [2]合肥国家同步辐射实验室,合肥230029

出　　处：《光学学报》2008年第12期2427-2430,共4页Acta Optica Sinica

基　　金：国家自然科学基金(10576021);中国工程物理研究院联合资助项目

摘　　要：采用双半波法布里-珀罗(F-P)干涉滤光片结构设计了中心波长在121.6nm的窄带滤光片,其峰值透射率为6.78%,通带半宽度为10.7nm。通过设计、制备和测量峰值波长在217nm的滤光片验证了设计用到的光学常数和膜厚定标都比较精确。在此基础上制备了121.6nm的窄带滤光片,到合肥同步辐射实验室测量的结果是中心波长在120.74nm,峰值透射率为5.94%,通带半宽度为12nm。可以看出实际制备的滤光片和预先设计的基本吻合但还是有一定的偏差,最后对实际测量的和理论设计的偏差进行了分析。The narrowband filter with central wavelength of 121.6 nm is designed based on the double half-wave Fabry-Perot interference filter, with peak transmittance of 6. 783% and half-peak bandwidth is 10.7 nm. A filter with the peak wavelength of 217 nm is designed, prepared and measured, and optical constants and scale of film thickness are precise. The filter with central wavelength of 121.6 nm is prepared based on the 217 nm filter, the transmittance of filter is measured with the central wavelength of 120.74 nm, the peak transmittance of 5.94 %, the half-peak bandwidth of 12 nm. The prepared filter is in accordance with prediction design in advance generally. At last the difference between experimental value and theoretical value is analysed.

关 键 词：薄膜光学 窄带滤光片 峰值透射率 通带半宽度 制备 

分 类 号：O434.2[机械工程—光学工程]