影响亚波长衍射光栅零级衍射效率的参数分析  

The Analysis of all Parameters that Affect the Zero-order Diffraction Efficiency of the Sub-wavelength Gratings

作　　者：张泽全[1,2] 沈国土[3] 张大伟[1] 黄元申[1] 庄松林[1] 

机构地区：[1]上海理工大学光电学院,上海200093 [2]郑州大学电气工程学院,郑州450001 [3]华东师范大学物理系,上海200062

出　　处：《郑州大学学报（理学版）》2008年第4期60-65,共6页Journal of Zhengzhou University:Natural Science Edition

基　　金：国家973项目,编号2005CB724304,2007CB93530;国家科技部支撑计划资助项目,编号2006BAK03A03

摘　　要：结合亚波长光栅的实际制作工艺,使用耦合波理论进行计算,对影响亚波长光栅零级衍射效率的各个参数进行了全面的分析,排除影响较小和实际无影响的参数,着重对影响较大的几个参数进行分析计算,完成了具有所期望零级衍射效率特性的用于光变色防伪技术的亚波长光栅的设计和制作,样品光栅零级衍射效率的测量结果验证了理论计算结果.All parameters that affect the zero-order diffraction efficiency of the sub-wavelength gratings are analyzed, and the diffraction efficiency is calculated with coupled-wave theory. In the design of the gratings exclude the parameters which have the smaller infection and maybe are im- possible based on the techniques of calculated on some parameters that the sub-wavelength gratings. The emph have bigger infection for diffraction eff the measure is consistent with the result of design,and the sub-wavelength character that is wanted. ases are analyzed and iciency. The result of grating has the filter

关 键 词：亚波长光栅 零级衍射效率 耦合波理论 滤波特性 方位角 

分 类 号：TB133[机械工程—光学工程]