一种基于光楔干涉的激光准直系统  

A Kind of Laser Measurement System Based on Wedge-shaped Plate Interference

作　　者：胡长德[1] 林玉池[2] 朱砂[1] 崔玉红[1] 

机构地区：[1]装备指挥技术学院士官系,北京102200 [2]天津大学精密测试技术及仪器国家重点试验室,天津300072

出　　处：《装备指挥技术学院学报》2008年第6期85-89,共5页Journal of the Academy of Equipment Command & Technology

基　　金：部委级资助项目

摘　　要：介绍了一种基于光楔干涉的激光准直系统：利用氦氖激光经准直、扩束后投射到固定在接收靶上的楔形光学平板上，产生的干涉条纹由光电传感器检测；将接收靶沿被测导轨移动，如果导轨有直线度误差，则接收靶过桥与导轨的接触点所形成的直线角度发生变化，这样干涉条纹就会发生移动；将光电传感器检测得到的干涉条纹移动量送入单片机系统，采用软件细分的方法，得到被测点相对于准直光束的偏移量。最后对该系统进行了对比与重复性实验。实验表明：用本套装置检测长度为40m的长导轨，直线度误差仅为674．961μm。A new kind of laser measurement system based on wedge-shaped plate interference is developed. High stability He-Ne laser beam which is collimated and broadened is cast on wedgeshaped glass plate. Then interference stripes are tested by photoelectricity sensor. The angle of the rail and target would be changed when the motion of the target is along the rail, for there is linear error existing in the rail. The interference stripes would be moved by the changed angle of the rail and target. The displacement of interference stripes are sent to MCU and dealt with by means of software subdivision. Then offset of the spot to the laser beam is acquired. The comparison tests and repeated tests show that the the linear error is 674. 961μm when the tested long rail is 40 meters long.

关 键 词：激光准直 干涉 长导轨 软件细分 直线度 

分 类 号：TH741[机械工程—光学工程]