压电双晶片的有限元分析及实验(英文)  

Finite element analysis and experiment on piezoelectric bimorph

作　　者：李龙土[1] 邬军飞[1] 褚祥诚[1] 季叶[1] 

机构地区：[1]清华大学材料科学与工程系新型陶瓷与精细工艺国家重点实验室,北京100084

出　　处：《光学精密工程》2008年第12期2378-2383,共6页Optics and Precision Engineering

基　　金：Supported by the NSAF(No.10676015);the National Natural Science Foundation of China(No.50621201);the National 863 High Technology Research and Development Program of China(No.2007AA03Z107);the New Star in Science and Technology of Beijing Novaprogram(No.2006B56)

摘　　要：采用有限元分析方法,分析了压电双晶片悬臂梁的位移形变特征。研究了金属弹性层、压电陶瓷片的材料属性及几何尺寸对双晶片偏转位移的影响;计算了双晶片的弹性模量、厚度以及加载电压与位移形变产生弯应力的关系;通过位移测试、弯应力测试等相关实验对有限元分析进行了验证。当加载电压为60V(120Vp-p)时,双晶片的偏转位移和弯应力分别为166μm和34.7m.N,实验结果证明本文所建的有限元模型是合理有效的。此外,测试了压电双晶片的振动特性,测得其谐振频率为310Hz,在该频率下加载20Vp-p电压,其端部位移输出即可达1.7mm。有限元分析结果及实验验证为压电双晶片结构的优化设计提供了依据。The deformation of bimorph is analyzed by using the Finite Element Method （FEM）. The influences of middle elastic beam and piezoelectric layer on the deflection actuator are studied. The correlations of the applied voltage, the elastic modulus of beam and the thickness of piezoelectric layer are analyzed quantitatively to provide a theoretical Basis and design method for the bimorph actuators. The mechanical force derived from the bimorph deformation is also studied. Furthermore, experiments are carried out to validate the finite element model. The vilidation shows that the tip-deflection can be as high as 166 μm at a voltage of 60 V, while the mechanical force is 34.7 m - N. The experiment results demonstrate that the piezoelectric bimorph model used in this paper is feasible and effective. Moreover, the resonance property of the bimorph is measured by the polytee 300-F scanning vibrometer. The bimorph performs an exceeding deflection about 1.7 mm at the tip when it resonates at a frequency about 310 Hz under an alternating voltage of 20 Vp-p. These numerical and experimental results are useful to design and optimize the piezoelectric bimorph.

关 键 词：压电双晶片 有限元法 PZT 偏转位移 

分 类 号：TN384[电子电信—物理电子学]