泰曼-格林型静态便携式干涉仪的设计  

Design of portable static state Tyman-Green interferometer

作　　者：马军[1] 何煦[1,2] 居波[1] 韩冰[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院研究生院,北京100393

出　　处：《光学精密工程》2008年第12期2524-2530,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.60507003)

摘　　要：基于经典泰曼-格林干涉理论提出了一种改进的干涉仪光路设计方案。与经典干涉理论对比,该方案具有共光路、结构紧凑、对环境因素不敏感、系统使用效率高等特点。通过对光学系统及标准平面的优化设计,其理论精度极值(PV)<1/12λ(λ=632.8nm)。对具体的光学系统、微调机构组件进行了三维设计,对干涉仪进行了实际装配调整,并与Mo¨ller像移式干涉仪做了比对测试实验,结果表明,该小型干涉仪的实际测量精度PV值<1/10λ。Based on Taymans-Green＇s classic interference theory, a improved optical design was described. Compared with the classical theory of light interference, the new design scheme is not sensitive to environmental factors, and also has advantages in compact structure, high efficiency and a shared light path. After optimizing design of the standard plate and optical system, the extreme measuring precision of the system （PV） is better than 1/12λ, （λ= 632.8 nm） in theory. A improved and portable interferometer was assembled and adjusted actually, and the comparison experiments with Moller phase shift interferometer was carried out. Experimental results show the measuring PV precision of assembed new interferometer is better than 1/10λ.

关 键 词：泰曼-格林干涉原理 波像差 离轴三反式光学系统 渡前叠加 

分 类 号：TH744.3[机械工程—光学工程]