光电测量设备光学系统的像面照度均匀性检测  

Measurement of image plane illumination non-uniformity of optical system in photoelectric equipment

作　　者：沈湘衡[1] 杨亮[1,2] 贺庚贤[1] 王力[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《光学精密工程》2008年第12期2531-2536,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.60507003)

摘　　要：提出了一种光电测量设备光学系统像面照度均匀性的检测方法。该方法首先对被检设备的CCD进行标定,然后用给出的均匀性检测系统对整机光学系统进行检测。该检测系统利用积分球产生均匀背景光信号,将光测设备置于积分球通光口处,利用计算机采集CCD图像。根据CCD的标定结果,用两点多段校正算法对采集到的图像进行校正,通过对校正后的图像进行分析,得到像面照度的不均匀度。此外,将图像分为多个区域,计算各个区域的灰度与像面中心区域灰度的比值,得出图像的灰度分布,实现了光电测量设备光学系统像面照度均匀性的室内检测。利用研制的光电测量设备光学系统像面照度均匀性检测系统对某型号光电测量设备进行了检测,得到了该设备光学系统像面照度不均匀度达到18.7%,不满足不均匀度≤10%的要求,应对该光测设备进行重新装调。在重新装调后对该设备进行复检,得到重新装调后的不均匀度为6.7%,像面照度均匀性得到了提高,验证了该方法的有效性。A measurement method was proposed for the image plane illumination non-uniformity of optical system in photoelectric measuring equipment. Firstlly, the CCD of photoelectric measuring equipment was calibrated by using an integrating sphere and then, the image plane illumination non-uniformity of whole optical system was measured. For simulating the background of sky, integrating sphere was used to provide an uniform radiant source. The photoelectric equipment was put on the front of integrating sphere,and a CCD image was captured by a computer. After analyzing the image, the image plane illumination non-uniformity of optical system was obtained. For improving the results, the two-point multi-section correction was used to correct the photoelectric response non-uniformity of CCD. Moreover, the corrected image was divided into several sections,and the ratio of average gray in each section to that in center area of image plane was calculated,so that the gray distribu-tion was obtained, by which the image plane illumination non-uniformity was measured indoor successfully. Finally,a group of experiment results was offered. In the experiment, a certain type of photoelectric equipment was measured. The imagine planes＇ illumination non-uniformity of optical system on the photoelectric equipment was 18.7%. Because the imagine planes＇ illumination non-uniformity was not satisfied with the indicator（≤10%）, we have the photoelectric equipment re-aligned. And the photoelectric equipment was measured again, the imagine planes illumination non-uniformity of optical system on the photoelectric equipment was 6. 7 %. The uniformity of image-forming system on photoelectric measuring equipment was enhanced.

关 键 词：像面照度不均匀度 光学镜头 CCD校正 积分球 光电测量设备 

分 类 号：TH703[机械工程—仪器科学与技术] TB96[机械工程—精密仪器及机械]