基于面阵CCD的光电测量设备光学系统像面照度不均匀度测量系统  

A System for Examining the Imagine Planes' Illumination Nonuniformity of Image-forming System on Photoelectric Measuring Equipment Using CCD

作　　者：王力[1] 贺庚贤[1] 沈湘衡[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所

出　　处：《光电子技术》2008年第3期212-215,共4页Optoelectronic Technology

摘　　要：一直以来光电测量设备光学系统像面照度不均匀度检测都没有精确的测量设备和检测系统。介绍了光电测量设备光学系统像面照度不均匀度测量系统。该测量系统采用积分球作为均匀面光源,面阵CCD作为光电接受器。通过对CCD进行均匀性校正的方法实现了对光学系统像面照度不均匀度的定量评价,检测结果准确、可靠。Since nonuniformity of image-forming system on photoelectric measuring equipment seriously limits his working performances, some research have been done on measuring nonuniformity of imageorming system to improve its image quality. The article proposes a system for examining the imagine planes＇ illumination nonuniformity of image-forming system on photoelectric measuring equipment using CCD. In the system, CCD is used to scan the whole imaging plane of image-forming system, integrating sphere is used to provide a uniform radiant source. For improving the result, a correction method is used based on the model of photoelectric signal to correct the photoelectric response nonuniformity of CCD. The developed system has the advantages of high precision and less influence of the environment. A group of experiment results is offered at last.

关 键 词：像面照度不均匀度 光学镜头 CCD校正 积分球 

分 类 号：O432.2[机械工程—光学工程]