基于NiFeCo/Cu多层膜巨磁电阻效应的磁微球检测  

Detections of magnetic microbeads based on GMR of NiFeCo/Cu multilayers

作　　者：牛永波[1] 冯洁[1] 陈翔[1] 郑金平[1] 

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术国家级重点实验室薄膜与微细技术教育部重点实验室,上海200030

出　　处：《功能材料与器件学报》2008年第6期1013-1018,共6页Journal of Functional Materials and Devices

基　　金：国家高技术研究发展计划863项目资助(No.2007AA04Z310)

摘　　要：分析了应用于磁性生物检测的GMR传感器的工作原理。直流磁控溅射法制备了Ni65Fe15Co20/Cu多层膜,研究了室温下多层膜的GMR效应对缓冲层(NiFeCo)厚度、间隔层(Cu)厚度及铁磁层(NiFeCo)厚度等参数的依赖关系,得到了GMR值达8.8%的多层膜样品:缓冲层(NiFeCo)5nm,间隔层(Cu)2.4nm,铁磁层(NiFeCo)1.6nm,且饱和场低、磁滞小、灵敏度较高,符合磁性生物检测技术的要求。制备了基于优化参数NiFeCo/Cu多层膜的GMR传感器,对器件的性能进行了测试,结果表明所制备的GMR传感器能够检测磁微球。The principle of GMR sensors for applications in magnetic biosensor was analyzed. Ni65Fe15Co20/ Cu multilayers were prepared by DC magnetron sputtering. Dependences of GMR on the thicknesses of buffer layer （ NiFeCo）, spacer layer （ Cu）, and ferromagnetic layer （NiFeCo） were studied, respectively. The maximum GMR of 8.8% was obtained for the as - deposited sample ： buffer layer 5nm, spacer layer Cu 2. 4nm, ferromagnetic layer NiFeCo 1.6nm, and the saturation field and the hysteresis of the sample were small, which means that the multilayer can meet the requirements of biosensor application. The GMR sensor based on the optimized muhilayers was fabricated. Elementary tests were done and in conclusion that the devices can detect magnetic microbeads.

关 键 词：巨磁电阻效应 多层膜 NiFeCo/Cu 磁性生物传感器 

分 类 号：TB79[一般工业技术—真空技术] O484[理学—固体物理]