扫描电声显微镜图像质量的提高  

Improvement of Image Quality for Scanning Electron Acoustic Microscope

作　　者：杨阳[1] 惠森兴[1] 张冰阳[1] 姚烈[1] 殷庆瑞[1] 

机构地区：[1]中国科学院上海硅酸盐研究所

出　　处：《电子显微学报》1998年第1期92-96,共5页Journal of Chinese Electron Microscopy Society

摘　　要：本文建立了数字电声像的采集装置。在扫描电声显微镜（ＳＥＡＭ：ＳｃａｎｎｉｎｇＥｌｅｃｔｒｏｎ－Ａｃｏｕｓ－ｔｉｃＭｉｃｒｏｓｃｏｐｅ）系统中采用了数字扫描发生器，代替了原来的模拟扫描发生器，从而实现由计算机控制电子束在试样上的扫描。通过数字图像处理，明显提高了电声像的信噪比，改善了电声像的质量。新系统还可以方便地对电声像进行优化、储存和打印处理。A special circuit for obtaining the digital image of Scanning Electron Acoustic Microscope(SEAM) has been developed in this paper. By using the digital scanning generator to replace the original analogue scanning generator of SEM, the scanning electron beam on the sample can be controlled by computer. By means of the digital image processing technique, the quality of SEAM image, such as signal to noise ratio, can be evidently improved. Furthermore, the present equipment is also convenient to optimize, store, and print out the image of SEAM.

关 键 词：SEM SEAM 动态幅度控制 数字扫描发生器 

分 类 号：TN16[电子电信—物理电子学]