应用于三坐标测量机的半光斑成像式激光测头  

Non-contact laser aiming detector based on half facular point optical imagery applied in coordinate measurement machine

作　　者：朱凌建[1,2] 刘君华[1] 张钟华[3] 邱宗明[2] 

机构地区：[1]西安交通大学,西安710049 [2]西安理工大学,西安710048 [3]中国计量科学研究院,北京100013

出　　处：《仪器仪表学报》2008年第12期2465-2469,共5页Chinese Journal of Scientific Instrument

摘　　要：运用半光斑成像原理研制出一种新型的半光斑成像非接触激光瞄准测头,采用自适应控制方法实时调节激光光强使其可以适应不同光学特性表面的瞄准测量,并对该测头重复性瞄准触发精度、不同光学特征表面的灵敏度特性进行了实验研究。实验结果表明该测头重复性瞄准测量不确定度在1μm以内,测量灵敏度可达30--60 mV/μm,测量角度在不增加辅助措施的前提下可以达45°,综合性能达到传统三角法光学测头的性能。该测头具有检测速度快、自动化程度高、瞄准精度高的特点,结合其他测长仪器可以实现自由曲面的快速、精确测量,具有广泛的应用前景和较强的实用价值。A new non-contact laser aiming detector based on half facular point optical imagery principle is presented in this paper. A closed-loop control method is adopted to adapt the detector to different material surfaces by adjusting light intensity. The aiming collimating repeatability error and sensitivity of the detector to different characteristic material surfaces have been studied on experiments. Laboratory experiment results show that the aiming detector has the virtues of aiming measurement repeatability precision in a standard deviation of 1 μm and sensitivity of 30 -60 mV/μm. The angle measurement scale is expected to 45 degree without any other accessorial equipment. It is expected that combining with other length measuring instrument, this method has the ability of curved surface tracking measurement with higher accuracy, and has a wide application prospect and good practical value.

关 键 词：半光斑成像 激光测头 曲面测量 

分 类 号：TH741[机械工程—光学工程]