从热电分开角度论述新型离子氮化炉的设计  

A New Design of Plasma Nitriding Furnace with theSeparation of Heating and Power Supplying

作　　者：刘军海[1] 何家文[1] 陆明珠[1] 苏启生[1] 

机构地区：[1]西安交通大学材料学院

出　　处：《真空电子技术》1998年第1期13-16,共4页Vacuum Electronics

摘　　要：本文论述一种新型离子氮化炉的设计。它主要由真空系统、辅助加热系统、专用电源系统、供气系统等组成。其特征在于采用了专门用于此目的而研制的幅度调制型直流脉冲电源，它可大大降低等离子体对工件升温的贡献，而工件按工艺要求所需的温度由辅助加热系统来平衡。这样结构的离子氮化炉在用于表面处理时，可完全实现工件加热和气体电离供电参数调整分开，即热电分开。电源参数调整的独立性使得寻求最佳工艺成为可能，以其提高等离子体表面渗氮的质量、缩短处理时间、节约能源。A new design for plasma nitriding furnace (PNF) has been described in this pa- per from the viewpoint of the separation of workpiece heating and gas-ionized power supplying. With this design the adjustment of power parameters for PNF will not disturb the temperature of workpiece in the furnace because an auxiliary heating is used for balance, The main features of this design are adoption of amplitude modulation pulse power specially designed for PNF and close feedback auxiliary heatitng systems. By use of this kind of PNF , the quality of plasma ni- triding layer on workpiece surface will be enhanced significantly.

关 键 词：离子氮化炉 热电分开 脉冲电源 渗氮 

分 类 号：TM924.702[电气工程—电力电子与电力传动] TG156.82[金属学及工艺—热处理]